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We summarized the current improvement position on the higher-power DUV laser both of those for the wavelength of FHG in the one-μm laser and at 193 nm. The new advancement of the stable-state/fiber laser, as well as the nonlinear optical crystals, prompts not simply the standard electric power but additionally the beam quality (coherence) in the DUV lasers to an unparalleled amount.
全固态紫外激光器以其体积小、寿命长、效率高、光束质量好、调谐范围宽、谱线窄等优点，广泛应用于机械探伤、光刻、微加工和医学等领域，等，利用大功率近红外相干光源作为基于非线性调谐技术的基频源，通过多级变频产生紫外相干辐射被认为是发展紫外相干光源的重要途径。紫外相干光源的关键问题是研制紫外波段的非线性光学变频晶体。非线性光学晶体是实现频率变换的条件之一，因此对非线性光学晶体的生长、尺寸、损伤电阻、转换效率和允许的参数范围提出了越来越高的要求。
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On the other facet, the ability scaling of the NIR laser is an additional part to improve the ordinary power of the 193-nm DUV laser. Mainly because of the deficiency of the high-ability amplification Answer of the NIR laser (as an example at 1553 nm), nonlinear frequency processes for example optical parameter oscillation (OPO) might be applied to create a wavelength converter by shifting the wavelength from one μm to the desired wavelength in addition to getting relative increased ability [21]. Recently, a diamond Raman laser confirmed its capability in obtaining a higher electricity and a significant conversion efficiency on the 1st Stokes with the 1-μm laser [22,23], which suggests the chance to be applied while in the 193-nm DUV laser technology due to its significant Raman attain and large frequency shift.
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While in the scientific and industrial purposes, the beam quality of the DUV laser can also be a vital parameter. Specially, the beam excellent of your DUV laser radically has an effect on the laser machining results. The beam quality of the DUV laser is determined by that of the elemental laser and the crystal with the frequency conversion. A short while ago, a superior-ability DUV laser (>ten W) at 258 nm was documented by using a beam top quality of M2 < 1.five, which was created by FHG of a Yb:YAG laser at 1030 nm using the CLBO crystal [13]. This laser would result in a better laser machining final result as compared to the past DUV lasers with more substantial M2.
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Cesium Lithium Borate (CsLiB6O10 or CLBO) is the most effective non-linear crystal which generates ultraviolet harmonics from the Nd:YAG basic laser wavelength. So as to greatly enhance the damage threshold, reduced CLBO surface area roughness, by ultra-precision machining, is needed. Because the CLBO crystal has straightforward hydroscopic reaction and micro scratches in machining, ultra-precise machining in the CLBO crystal can be a challenging specialized issue.
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Its UV absorption edge reaches 180 nm. The powerful nonlinear optical coefficient of CLBO for frequency doubling at 1064nm is about 2 times as big as that of KDP. CLBO crystals is often developed in the stoichiometric melt with decreased viscosity.
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